Acoustic wave device and fabrication method thereof
AssigneeRichWave Technology Corp.
InventorHao-Min Huang
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Abstract
An acoustic wave device includes a piezoelectric substrate, a plurality of transducers, and a film. The piezoelectric substrate includes a recess, and the plurality of transducers are positioned in the recess. At least one of the plurality of transducers includes a first bus bar disposed in parallel to a first direction, a plurality of first electrodes extended in parallel to a second direction from the first bus bar, a second bus bar disposed in parallel to the first direction, and a plurality of second electrodes extended in parallel to the second direction from the second bus bar. The film covers the recess of the piezoelectric substrate.
Claims20
An acoustic wave device comprising:
- a piezoelectric substrate having a recess;
- a plurality of transducers positioned in the recess, wherein
- at least one of the plurality of transducers comprises:
- a first bus bar disposed in parallel to a first direction;
- a plurality of first electrodes extended in parallel to a second direction from the first bus bar;
- a second bus bar disposed in parallel to the first direction;
- and
- a plurality of second electrodes extended in parallel to the second direction from the second bus bar;
- and
- a film covering the recess of the piezoelectric substrate.
A fabrication method of an acoustic wave device comprising:
- providing a piezoelectric substrate;
- forming a recess in the piezoelectric substrate;
- forming a plurality of transducers in the recess;
- and
- forming a film covering the recess of the piezoelectric substrate.
Dependencies are inferred from the claim text.