Multilayer piezoelectric substrate device with reduced nonlinear response and interdigital transducer electrodes with randomly oriented crystallographic domains
AssigneeSkyworks Solutions, Inc.
InventorsYiliu Wang, Yosuke Hamaoka, Nan Wu
Life of this patent
Estimating the term…
Abstract
Aspects and embodiments disclosed herein include a surface acoustic wave resonator including a multilayer piezoelectric substrate, a crystallization disorientation layer disposed on an upper surface of the multilayer piezoelectric substrate, and interdigital transducer electrodes disposed on an upper surface of the crystallization disorientation layer, methods of forming such a surface acoustic wave resonator, and acoustic wave filters and devices including same.
Claims20
A surface acoustic wave resonator comprising:
- a multilayer piezoelectric substrate;
- a crystallization disorientation layer disposed on an upper surface of the multilayer piezoelectric substrate;
- and
- interdigital transducer (IDT) electrodes disposed on an upper surface of the crystallization disorientation layer.
A method of forming a surface acoustic wave resonator, the method comprising:
- forming a crystallization disorientation layer on an upper surface of multilayer piezoelectric substrate;
- and
- forming interdigital transducer (IDT) electrodes on an upper surface of the crystallization disorientation layer.
A duplexer comprising:
- a transmit side acoustic wave filter including a first multilayer piezoelectric substrate surface acoustic wave resonator;
- and
- a receive side acoustic wave filter including a second multilayer piezoelectric substrate surface acoustic wave resonator, interdigital transducer electrodes of the second multilayer piezoelectric substrate surface acoustic wave resonator having a lesser degree of crystallographic orientation than interdigital transducer electrodes of the first multilayer piezoelectric substrate surface acoustic wave resonator.
Dependencies are inferred from the claim text.