Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKentaro FUJINAGA, Goro TSUBOUCHI, Takashi IWAMOTO
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Abstract
An acoustic wave device includes a piezoelectric layer including first and second main surfaces, an upper electrode on the first main surface, a lower electrode on the second main surface, and a support facing the second main surface of the piezoelectric layer. The piezoelectric layer includes an opening extending through the piezoelectric layer in a thickness direction in a region overlapping the lower electrode and not overlapping the upper electrode. The acoustic wave device further includes an overlapping electrode on the lower electrode in a region overlapping the opening and made of the same material as the upper electrode.
Claims20
An acoustic wave device comprising:
- a piezoelectric layer including a first main surface and a second main surface opposite to the first main surface;
- an upper electrode on the first main surface of the piezoelectric layer;
- a lower electrode on the second main surface of the piezoelectric layer;
- and
- a support facing the second main surface of the piezoelectric layer;
- wherein
- the piezoelectric layer includes an opening extending through the piezoelectric layer in a thickness direction in a region that overlaps the lower electrode and does not overlap the upper electrode;
- and
- the acoustic wave device further includes an overlapping electrode on the lower electrode in a region that overlaps the opening and including a same material as the upper electrode.
Dependencies are inferred from the claim text.