Insulation gas for high voltage component of electron microscopes
OwnerAbderraouf Methlouthi, Corne van Rooijinventors
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Abstract
Provided herein is an electron particle system comprising an electron source system comprising a high voltage component housed within a high voltage component volume occupied by an insulation gas, a sample chamber, and an electron beam column. Also provided herein is a charged particle system comprising a charged source system comprising a high voltage component housed within a high voltage component volume occupied by an insulation gas, a sample chamber, and an electron beam column. Further provided herein is a method of using an insulation gas in a high voltage component of an electron particle system.
Claims20
An electron particle system, comprising:
- an electron source system comprising a high voltage component housed within a high voltage component volume defined by the electron source system, wherein the electron source system is configured to generate an electron beam, wherein an insulation gas occupies the high voltage component volume, and wherein the insulation gas comprises a mixture of trifluoroiodomethane (CF3I) and at least one other gas selected from the group consisting of oxygen (O2), carbon dioxide (CO2), and nitrogen (N2);
- a sample chamber comprising a stage configured to support a sample;
- and
- an electron beam column configured to direct the electron beam towards the sample.
A charged particle system, comprising:
- a charged particle source system comprising a high voltage component housed within a high voltage component volume defined by the charged particle source system, wherein the charged particle source system is configured to generate a charged particle beam, wherein an insulation gas occupies the high voltage component volume, and wherein the insulation gas comprises a mixture of a trifluoro gas and at least one other gas selected from the group consisting of atmospheric air, oxygen (O2), carbon dioxide (CO2), and nitrogen (N2);
- a sample chamber comprising a stage configured to support a sample;
- and
- an electron beam column configured to direct the electron beam towards the sample.
A method of using an insulation gas in a high voltage component of an electron particle system, comprising:
- mixing trifluoroamine oxide (F3NO) and at least one other gas selected from the group consisting of atmospheric air, oxygen (O2), carbon dioxide (CO2), and nitrogen (N2) to make the insulation gas;
- injecting the insulation gas into a high voltage component volume, wherein the high voltage component volume is leak-free;
- and
- pressurizing the high voltage component volume before operating the electron particle system.
Dependencies are inferred from the claim text.