Charged particle assessment tool, inspection method
AssigneeASML Netherlands B.V.
InventorMarco Jan-Jaco WIELAND
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Abstract
A multi-beam electron-optical system for a charged-particle assessment tool, the system comprising: a plurality of control lenses, a plurality of objective lenses and a controller. The plurality of control lenses are configured to control a parameter of a respective sub-beam. The plurality of objective lenses are configured to project one of the plurality of charged-particle beams onto a sample. The controller controls the control lenses and the objective lenses so that the charged particles are incident on the sample with a desired landing energy, demagnification and/or beam opening angle.
Claims15
-20. (canceled)
A multi-beam charged-particle optical system for a charged-particle assessment tool, the system comprising:
- an objective lens array assembly comprising a plurality of aperture arrays, the objective lens array assembly configured to:
- focus a plurality of sub-beams on a sample;
- and
- control a parameter of the sub-beams, the parameter being at least one of:
- landing energy of the sub-beams on the sample surface, opening angle of respective sub-beams, or magnification of respective sub-beams.
Dependencies are inferred from the claim text.