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US 2026/0099007 A1Published application
Undercut-assisted long range evanescent coupling between waveguides
AssigneeApplied Materials, Inc.
InventorsJinxin Fu, Zijiao Yang
Life of this patent
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Abstract
An optical device includes a substrate, cladding material on the substrate, a first inner core within the cladding material, and a trench in the substrate that assists with evanescent coupling of an optical signal between the first inner core and a second inner core that is positioned farther from the substrate than the first inner core.
Claims20
An optical device comprising:
- a substrate;
- cladding material on the substrate;
- a first inner core within the cladding material;
- and
- a trench in the substrate that assists with evanescent coupling of an optical signal between the first inner core and a second inner core that is positioned farther from the substrate than the first inner core.
2 more elements
An optical device comprising:
- an optical interposer comprising an interposer substrate, first cladding material on the interposer substrate, and a plurality of interposer inner cores within the first cladding material;
- and
- a photonic integrated circuit (PIC), coupled to the optical interposer, comprising a PIC substrate, second cladding material on the PIC substrate, at least one PIC inner core within the second cladding material, and a trench in the interposer substrate that assists with evanescent coupling of an optical signal between the plurality of interposer inner cores and the at least one PIC inner core.
A method comprising:
- forming a trench within a substrate;
- and
- forming, from the substrate, a component of an optical device, the component comprising:
- cladding material on the substrate that encloses the trench;
- and
- a first inner core within the cladding material, wherein the trench assists with evanescent coupling of an optical signal between the first inner core and a second inner core that is positioned farther from the substrate than the first inner core.
3 more elements
Dependencies are inferred from the claim text.