Silicon photonic crystal
AssigneeConsiglio Nazionale Delle Ricerche
InventorsSabrina CONOCI, Alessia IRRERA, Antonio Alessio LEONARDI, Corrado Rosario SPINELLA
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Abstract
Silicon photonic crystal (10; 10′; 10″) comprising periodic silicon structures (12) contiguous with voids (14), and a silicon resonant cavity (16) consisting of silicon nanowires (18) entirely made of silicon with uniform doping, said nanowires acting as active medium of the photonic crystal.
Claims10
Silicon photonic crystal comprising periodic silicon structures contiguous with voids, and a silicon resonant cavity, wherein the resonant cavity consists of nanowires entirely made of silicon with uniform doping, said nanowires acting as active medium of the photonic crystal.
Method of manufacturing a silicon photonic crystal comprising the steps of:
- providing a base silicon photonic crystal comprising periodic silicon structures contiguous with voids and a silicon cavity,
- obtaining, in said cavity, a plurality of silicon nanowires entirely made of silicon with uniform doping,
- wherein the silicon nanowires are made by subjecting said silicon cavity to metal-assisted chemical etching with the use of thin percolative layers of gold as metal catalyst.
Dependencies are inferred from the claim text.