Resin, composition, photocrosslinked product, pattern, and electronic device comprising same
AssigneeTosoh Corporation
InventorsJunghwi LEE, Takashi FUKUDA, Shinya OKU
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AssigneeTosoh Corporation
InventorsJunghwi LEE, Takashi FUKUDA, Shinya OKU
Estimating the term…
An object of an aspect of the present invention is to provide a resin that has liquid-repellency and high solubility in an alkaline solution, and becomes insoluble in the solvent by photocrosslinking at low light exposure intensity. A resin in accordance with an aspect of the present invention contains: a repeating unit that is represented by Formula (1) including a photocrosslinkable group; and one or more units selected from the group consisting of a repeating unit that includes a fluorine atom, a repeating unit that includes an acidic functional group and a repeating unit that includes a hydrophilic functional group, where R1 represents hydrogen or methyl, L1 represents a single bond or a linking group, A represents a linking group, and R2 through R6 represent one selected from the group consisting of hydrogen, halogen, alkyl, alkyl halide, alkoxy, aryl, aryloxy, cyano, and amino.
A resin comprising:
Dependencies are inferred from the claim text.