Device for TOC Reduction in Ultrapure Water
AssigneeOvivo Inc.
InventorsAlexandre Devillers, Philippe Rychen
Life of this patent
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Abstract
For TOC reduction by UV radiation, in the production of ultrapure water, a cylindrical UV reactor surrounded by a quartz sleeve radiates through an annular water flow channel no more than 10 mm to 15 mm wide. This causes the water to circulate in the annular zone highly exposed to the 185 nm wavelength of the UV radiation, as well as all other wavelengths under 200 nm. For optimization of mixing of the water in the zone, baffles or perturbators are provided at a series of locations to effect mixing of different layers of liquid thus promoting radial movement of the water around the quartz tube.
Claims11
A device for TOC reduction by UV oxidation in the production of ultrapure water, comprising:
- an elongated stainless steel cylindrical tube,
- an elongated high purity quartz tube within the stainless steel tube, defining an annular channel volume no greater than about 10 mm in width between the quartz tube and the stainless steel tube,
- a UV source within the quartz tube, positioned to radiate UV radiation outwardly through the annular channel volume, the radiation including wavelengths smaller than 200 nm, and
- an inlet for water at one end of the elongated stainless steel tube and an outlet for water at an opposite end, so that water can be conducted through the annular channel volume from the one end to the opposite end to oxidize and/or reduce TOC in the water.
A device for TOC reduction by UV oxidation in the production of ultrapure water, comprising:
- an elongated stainless steel cylindrical tube,
- an elongated high purity quartz tube within the stainless steel tube, defining an annular channel volume no greater than about 15 mm in width between the quartz tube and the stainless steel tube,
- a UV source within the quartz tube, positioned to radiate UV radiation outwardly through the annular channel volume, the radiation including wavelengths of smaller than 200 nm,
- an inlet for water at one end of the elongated stainless steel tube and an outlet for water at an opposite end, so that water can be conducted through the annular channel volume from the one end to the opposite end to oxidize and reduce TOC in the water, and
- including at least one baffle within the annular channel volume in the path of water to flow through the volume, effective to cause exchange between inner and outer layers of the water as the water moves through the annular channel volume, exposing substantially all such flowing water to close proximity to the quartz tube and the UV source.
Dependencies are inferred from the claim text.