MEMS Sensor Module

A MEMS sensor module, comprising:

• an inner space enclosed by a side wall;
• a first circuit board disposed on a top of the side wall;
• a second circuit board disposed on a bottom of the side wall;
• a dividing wall disposed in the inner space and connected to the side wall for dividing the inner space into a first cavity and a second cavity;
• a first MEMS sensor disposed in the first cavity and wrapped by glue;
• a second MEMS sensor disposed in the second cavity;
• a first golden finger layer disposed between the side wall and the first circuit board as well as between the dividing wall and the first circuit board for respectively surrounding the first cavity and the second cavity;
• a second golden finger layer disposed between the side wall and the second circuit board as well as between the dividing wall and the second circuit board for respectively surrounding the first cavity and the second cavity;
• and
• a notch formed in the first golden finger layer at the dividing wall for communicating the first cavity and the second cavity.