Mems device

Abstract

In an embodiment a MEMS device includes a transducer element having a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration, wherein the rigid electrode structure is arranged between the first and second deflectable membrane structures, wherein each of the first and second deflectable membrane structures comprises a deflectable portion, and wherein the deflectable portion of the first deflectable membrane structure and the deflectable portion of the second deflectable membrane structure are mechanically coupled by mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure, a carrier element for supporting the transducer element, and a plurality of clamping structures mechanically connecting the transducer element to the carrier element along spaced perimeter regions of the transducer element.

Dependencies are inferred from the claim text.