Pbn container and method for producing pbn container
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsAkihiro HIRATE, Noboru KIMURA, Takuma KUSHIHASHI, Shoji KANO, Waichi YUMAMURA
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsAkihiro HIRATE, Noboru KIMURA, Takuma KUSHIHASHI, Shoji KANO, Waichi YUMAMURA
Estimating the term…
A PBN container including a container body made of a laminate of pyrolytic boron nitride, and a conductive film coating a surface of the container body, in which an angle θ between a cut face of the container body and an inner wall surface or an outer wall surface of the container body adjacent to the cut face is 20° or more and 80° or less across an entire circumference of an aperture of the container body, and a tip portion of the aperture of the container body has a shape having a curvature radius R of 0.2 mm or more and 3.0 mm or less across the entire circumference of the aperture of the container body. The PBN container is excellent in durability where the conductive film is laminated on a surface of the container body formed by depositing PBN, and the method for producing such a PBN container.
A PBN container comprising:
A method for producing a PBN container, the method comprising the steps of:
Dependencies are inferred from the claim text.