Imprinting device, imprinting method, and method for manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorSATOSHI IINO
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorSATOSHI IINO
Estimating the term…
An imprinting device includes a measurement unit detecting marks provided on a mold and a substrate, a substrate stage moving in a state of holding the substrate, and a control unit controlling the measurement unit and the substrate stage. The mold has first and second mark groups used for positional alignment with the substrate. The measurement unit acquires information on a relative positional relationship between the first mark group and the second mark group for each individual mold. The control unit controls the substrate stage to positionally align the mold and the substrate on the basis of the information on the relative positional relationship between the first mark group and the second mark group on a first mold and the mold, and information on a superposition error between the first mark group and the second mark group on the first mold and the marks on the substrate.
An imprinting device comprising:
An imprinting method comprising:
Dependencies are inferred from the claim text.