Filter cleaning methods and apparatuses
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Lung CHUNG, Heng-Yi TSENG, Shun Chan TENG, Chih-Cheng HUNG, Tsung-Han LEE, Feng-An YANG, Young CHEN, Sheng Chia KUO, Jung-Huang PENG
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Abstract
A method for cleaning a filter includes flowing a cleaning fluid through a filter housing to clean the filter in the filter housing and obtaining flowing parameters of the cleaning fluid. The method further includes determining a condition of the filter based on the flowing parameters of the cleaning fluid, and associating the flowing parameters to attributes of the filter when the condition of the filter is clean.
Claims20
A method for cleaning a filter, comprising:
- flowing a cleaning fluid through a filter housing to clean the filter in the filter housing;
- obtaining flowing parameters of the cleaning fluid;
- determining a condition of the filter based on the flowing parameters of the cleaning fluid;
- and
- associating the flowing parameters to attributes of the filter when the condition of the filter is clean.
A method for cleaning a filter, comprising:
- flowing a cleaning fluid through a filter housing to clean the filter in the filter housing;
- providing attributes of the filter to an artificial intelligence engine;
- determining, by the artificial intelligence engine, flowing parameters of the cleaning fluid based on the attributes of the filter;
- and
- associating the flowing parameters to the filter when a condition of the filter is clean.
An apparatus for cleaning a filter, comprising:
- a processor;
- and
- a non-transitory computer readable storage medium storing a program, wherein the processor is programmed to:
- flow a cleaning fluid through a filter housing to clean the filter in the filter housing;
- obtain flowing parameters of the cleaning fluid;
- determine a condition of the filter based on the flowing parameters of the cleaning fluid;
- and
- associate the flowing parameters to attributes of the filter when the condition of the filter is clean.
Dependencies are inferred from the claim text.