# US 2026/0096383 A1 · Flexible chuck with strain gauge > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2026/0096383 A1 - Document ID: US20260096383A1 - Status: Published application - Kind: A1 - Application number: 18/902,412 - Filed: 2024-09-30 - Published: 2026-04-02 - Earliest claimed: 2024-09-30 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Edward Brian Fletcher; Seth J. Bamesberger; Xiaoming Lu - Web page: https://patentgrep.com/patent/US20260096383A1 ## CPC - H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting} - G01L 5/0076: {Force sensors associated with manufacturing machines (G01L5/0066, G01L5/0071 and B23Q17/09 take precedence; for the specific machine or operation involved see relevant class, e.g. B21 - B42)} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) ## Abstract Some devices and systems comprise an annular flexible chuck for holding a superstrate; an air cavity enclosed in part by a flexible portion of the annular flexible chuck; a pressure controller for applying air pressure to the air cavity, while the annular flexible chuck holds the superstrate, causing the flexible portion and the superstrate to bow; strain gauges positioned on the flexible portion of the annular flexible chuck; and a controller configured to estimate a curvature of the annular flexible chuck based on strain information received from the strain gauges and adjust the shaping system based on the curvature. ## Claims ### Claim 1 A shaping system comprising: an annular flexible chuck for holding a superstrate; an air cavity enclosed in part by a flexible portion of the annular flexible chuck; a pressure controller for applying air pressure to the air cavity, while the annular flexible chuck holds the superstrate, causing the flexible portion and the superstrate to bow; strain gauges positioned on the flexible portion of the annular flexible chuck; and a controller configured to estimate a curvature of the annular flexible chuck based on strain information received from the strain gauges and adjust the shaping system based on the curvature. ### Claim 2 (depends on 1) The shaping system of claim 1, wherein adjusting includes one or more of: sending a notification about replacing the annular flexible chuck; adjusting the air pressure in the air cavity; adjusting a position trajectory applied to the annular flexible chuck; and adjusting a force trajectory applied to the annular flexible chuck. ### Claim 3 (depends on 1) The shaping system of claim 1, wherein the controller is configured to: start separation of the superstrate from cured formable material on a substrate; estimate the curvature during the separation based on the strain information received from the strain gauges; and control the separation based on the curvature. ### Claim 4 (depends on 1) The shaping system of claim 1, wherein the controller is configured to: send instructions to the pressure controller to apply a first pressure to the air cavity; estimate the curvature prior to the superstrate contacting formable material on a substrate; send instructions to reduce the air pressure in the cavity and reapply the air pressure, based on the curvature; and send instructions to move the annular flexible chuck towards a substrate chuck based on the curvature. ### Claim 5 (depends on 1) The shaping system of claim 1, wherein the controller is further configured to: estimate a curvature of the superstrate based on the curvature of the annular flexible chuck. ### Claim 6 (depends on 1) The shaping system of claim 1, wherein the controller is further configured to: detect whether the curvature of the annular flexible chuck is a first shape; and in response to detecting that the curvature of the annular flexible chuck is a first shape, stopping a movement of the annular flexible chuck. ### Claim 7 (depends on 1) The shaping system of claim 1, wherein the controller is further configured to: detect whether the curvature of the annular flexible chuck is a first shape; and in response to detecting that the curvature of the annular flexible chuck is a first shape, (i) send instructions to the pressure controller to increase the air pressure in the air cavity, then reduce the air pressure in the air cavity, and then repressurize the air cavity, (ii) estimate a new curvature of the annular flexible chuck based on strain information received from the strain gauges after the reduction of the air pressure in the air cavity, and (iii) detect whether the new curvature of the annular flexible chuck is the first shape. ### Claim 8 (depends on 7) The shaping system of claim 7, wherein the controller is further configured to repeat (i), (ii), and (iii) until the new curvature of the annular flexible chuck has a second shape different from the first shape. ### Claim 9 (depends on 1) The shaping system of claim 1, wherein the strain gauges are located inside the air cavity. ### Claim 10 A method comprising: applying air pressure to an air cavity enclosed in part by a flexible portion of an annular flexible chuck and a superstrate of a shaping system, wherein the annular flexible chuck holds the superstrate, and wherein applying the air pressure to the air cavity causes the flexible portion and the superstrate to bow; obtaining strain information about the flexible portion of the annular flexible chuck; and adjusting the shaping system based on the strain information. ### Claim 11 (depends on 10) The method of claim 10, wherein adjusting the shaping system based on the strain information includes one or more of: sending a notification about replacing the annular flexible chuck; adjusting the air pressure in the air cavity; adjusting a position trajectory applied to the annular flexible chuck; and adjusting a force trajectory applied to the annular flexible chuck. ### Claim 12 (depends on 10) The method of claim 10, further comprising: starting separation of the superstrate from cured formable material on a substrate; estimating a curvature of the annular flexible chuck during the separation based on the strain information; and controlling the separation based on the curvature. ### Claim 13 (depends on 10) The method of claim 10, further comprising: applying a first pressure to the air cavity; estimating, based on the strain information, a curvature of the annular flexible chuck prior to the superstrate contacting formable material on a substrate; reducing the air pressure in the cavity and reapplying the air pressure, based on the curvature; and moving the annular flexible chuck towards a substrate chuck based on the curvature. ### Claim 14 (depends on 10) The method of claim 10, further comprising: detecting that degradation of the annular flexible chuck exceeds a threshold based on the strain information. ### Claim 15 (depends on 10) The method of claim 10, further comprising: detecting, based on the strain information, whether a curvature of the annular flexible chuck is a first shape; and in response to detecting that the curvature of the annular flexible chuck is a first shape, stopping a movement of the annular flexible chuck. ### Claim 16 (depends on 10) The method of claim 10, further comprising: detecting, based on the strain information, whether a curvature of the annular flexible chuck is a first shape; and in response to detecting that the curvature of the annular flexible chuck is a first shape, (i) increasing the air pressure in the air cavity, then reducing the air pressure in the air cavity, and then repressurizing the air cavity, (ii) estimating a new curvature of the annular flexible chuck based on strain information received after the reduction of the air pressure in the air cavity, and (iii) detecting whether the new curvature of the annular flexible chuck is the first shape. ### Claim 17 (depends on 16) The method of claim 16, further comprising: repeating (i), (ii), and (iii) until the new curvature of the annular flexible chuck has a second shape different from the first shape. ### Claim 18 (depends on 16) The method of claim 16, further comprising: bringing the superstrate into contact with formable material on a substrate; separating the superstrate from the formable material on the substrate; and processing the formable material and the substrate to manufacture a plurality of articles. ### Claim 19 A shaping system comprising: an annular flexible chuck adapted to hold a superstrate; a pressure controller adapted to increase or decrease an air pressure in an air cavity enclosed in part by a flexible portion of the annular flexible chuck, wherein increasing or decreasing the air pressure while the annular flexible chuck holds the superstrate causes the flexible portion and the superstrate to bow; strain gauges that are configured to measure strain at different locations on the flexible portion of the annular flexible chuck and to generate strain measurements that indicate the measured strain; and a controller configured to estimate one or more shape-characteristic values of the annular flexible chuck based on the strain measurements received from the strain gauges and adjust the shaping system based on the one or more shape-characteristic values. ### Claim 20 (depends on 19) The shaping system of claim 19, wherein adjusting the shaping system includes one or more of: sending a notification about replacing the annular flexible chuck; adjusting the air pressure in the air cavity; adjusting a position trajectory applied to the annular flexible chuck; and adjusting a force trajectory applied to the annular flexible chuck.