Rram structure and method of fabricating the same

Abstract

A fabricating method of an RRAM includes forming a bottom electrode that includes an inverted T-shaped profile followed by sequentially forming a resistive switching layer and a top electrode from bottom to top. The inverted T-shaped profile includes a bottom element and a vertical element disposed on the bottom element. The detailed process steps include forming a first metal layer and a dummy material layer covering the first metal layer. The dummy material layer is then etched to form a recess, exposing the first metal layer. A second metal layer is formed to fill the recess. After removing the dummy material layer, a resistive switching material layer and a third metal layer are formed in sequence. Finally, the third metal layer, the resistive switching material layer, and the first metal layer are patterned to form the top electrode, the resistive switching layer, and the bottom electrode.

Dependencies are inferred from the claim text.