Three-dimensional memory devices
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsKun Zhang, Wenxi Zhou, Zhiliang Xia, Zongliang Huo
Life of this patent
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Abstract
A three-dimensional (3D) memory device is disclosed. The 3D memory device includes a memory stack, a semiconductor layer above the memory stack, a plurality of channel structures each extending vertically through the memory stack, and a source contact above the memory stack and in contact with the semiconductor layer. A semiconductor plug, in contact with the semiconductor layer, surrounds an end of one of the channel structures. The source contact is electrically connected with the one of the channel structures. At least a portion of the source contact is buried within the semiconductor layer.
Claims20
A three-dimensional (3D) memory device, comprising:
- a memory stack comprising interleaved conductive layers and dielectric layers;
- a semiconductor layer above the memory stack;
- channel structures each extending vertically through the memory stack, wherein each of the channel structures comprises a semiconductor channel extending into the semiconductor layer and being in contact with the semiconductor layer;
- and
- a source contact connected to the semiconductor layer and a peripheral circuit, wherein the source contact and the memory stack are arranged at opposite sides of the semiconductor layer.
A three-dimensional (3D) memory device, comprising:
- a first semiconductor structure comprising a peripheral circuit and a first bonding layer over the peripheral circuit;
- a second semiconductor structure comprising:
- a memory stack comprising interleaved conductive layers and dielectric layers;
- an N-type doped semiconductor layer above the memory stack;
- channel structures each extending vertically through the memory stack, each of the channel structures comprising a semiconductor channel extending into the N-type doped semiconductor layer and being in contact with the N-type doped semiconductor layer;
- a source contact in contact with the N-type doped semiconductor layer, the source contact and the memory stack being arranged at opposite sides of the N-type doped semiconductor layer;
- and
- a second bonding layer disposed over a side of the memory stack away from the N-type doped semiconductor layer, the second bonding layer being bonded with the first bonding layer,
- wherein:
- the memory stack comprises staircase structures each comprising a pair of a conductive layer and a dielectric layer, the conductive layer and the dielectric layer of the pair of the conductive layer and the dielectric layer extending laterally perpendicular to the channel structures and ending at a staircase structure;
- and
- a first extending length of a first staircase structure is larger than a second extending length of a second staircase structure, the second staircase structure being closer to the N-type doped semiconductor layer than the first staircase structure.
Dependencies are inferred from the claim text.