Electroacoustic transducer with electrical connections on a membrane

A method of manufacturing a microelectromechanical electroacoustic transducer, comprising:

• forming a supporting frame containing semiconductor material having a cavity that is open on one side;
• forming a membrane of semiconductor material connected to the supporting frame along a perimeter to close the cavity, the membrane including a peripheral portion and a central portion;
• forming radial slits extending in a radial direction from respective vertices of the membrane towards the central portion to divide the membrane into a plurality of sectors, the radial slits defining cantilever elements in the peripheral portion and tabs in the central portion;
• forming elastic elements from respective portions of the membrane, each elastic element comprising an outer anchor attached to a respective cantilever element, an inner anchor attached to a respective tab, and outer arms and inner arms connecting the outer anchor to the inner anchor;
• forming a central piezoelectric transducer on the central portion of the membrane, the central piezoelectric transducer comprising a bottom electrode, a piezoelectric body, and a top electrode;
• forming metal lines extending on respective elastic elements and on the central portion of the membrane from the elastic elements to the central piezoelectric transducer, the metal lines being made of a conductive material that is immune to oxidation by exposure to atmosphere;
• and
• electrically coupling the metal lines to the central piezoelectric transducer to provide electrical connections thereto.