Vibration-type actuator, electronic device, optical apparatus, and manufacturing method for vibration-type actuator
AssigneeCanon Kabushiki Kaisha
InventorsAKIRA UEBAYASHI, TAKAYUKI WATANABE
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AssigneeCanon Kabushiki Kaisha
InventorsAKIRA UEBAYASHI, TAKAYUKI WATANABE
Estimating the term…
A vibration-type actuator of the present disclosure includes a vibrator including an electromechanical energy conversion element and an elastic body, the elastic body having a plate portion and protruding portions that protrude in the same direction out of a plane of the plate portion, a contact body that is in contact with the protruding portions of the vibrator and that moves relative to the vibrator, a foamed member that is in contact with the vibrator, and an urging member that urges the vibrator toward the contact body via the foamed member. The foamed member includes siloxane bonds, Si—O—Si, made of silicon and oxygen, and a ratio NQ/ND of the number NQ of Q units to the number ND of D units is greater than or equal to 0.09 in silicon contained in the foamed member.
A vibration-type actuator comprising:
A manufacturing method for a vibration-type actuator, the manufacturing method comprising:
Dependencies are inferred from the claim text.