# US 2026/0094792 A1 · Contamination detection system and method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2026/0094792 A1 - Document ID: US20260094792A1 - Status: Published application - Kind: A1 - Application number: 18/901,727 - Filed: 2024-09-30 - Published: 2026-04-02 - Earliest claimed: 2024-09-30 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Wolfgang Aderhold - Web page: https://patentgrep.com/patent/US20260094792A1 ## CPC - H01J 37/32862: {In situ cleaning of vessels and/or internal parts} - H01J 2237/2445: Photon detectors for X-rays, light, e.g. photomultipliers - H01J 2237/24585: Other variables, e.g. energy, mass, velocity, time, temperature - H01J 2237/24592: Inspection and quality control of devices - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract Described herein is a method for detecting contaminations in a process chamber is provided. The method includes flowing a gas into a process chamber, and igniting a flame in the process chamber at a contact region between the gas a surface in the process chamber. The method may also include measuring one or more properties of the flame using an optical sensor, and identifying a contamination on the surface based on the one or more properties of the flame. ## Claims ### Claim 1 A method comprising: flowing a gas into a process chamber; igniting a flame in the process chamber at a contact region between the gas and a surface in the process chamber; measuring one or more properties of the flame using an optical sensor; and identifying a contamination on the surface based on the one or more properties of the flame. ### Claim 2 (depends on 1) The method of claim 1, wherein the optical sensor comprises a spectrometer. ### Claim 3 (depends on 2) The method of claim 2, wherein the optical sensor comprises a filter, wherein the filter filters out wavelengths of light that are outside of a target wavelength associated with a specific type of contamination, and wherein the optical sensor measures an intensity of the flame based on filtered light that has been filtered by the filter. ### Claim 4 (depends on 3) The method of claim 3, wherein the target wavelength is selected from a range from 200 to 1000 nm. ### Claim 5 (depends on 3) The method of claim 3, wherein the target wavelength corresponds to a wavelength that is produced by iron contamination. ### Claim 6 (depends on 1) The method of claim 1, further comprising: determining that the flame outputs light having a wavelength of from 200 to 1000 nm; and identifying the contamination based on the wavelength. ### Claim 7 (depends on 1) The method of claim 1, further comprising: initiating a cleaning process for the process chamber responsive to identifying the contamination. ### Claim 8 (depends on 7) The method of claim 7, further comprising performing a seasoning process for the process chamber responsive to identifying the contamination. ### Claim 9 A system comprising: a process chamber; a window attached to the process chamber; a gas nozzle configured to distributed at least one gas into the process chamber; an optical sensor on the outside of the process chamber, wherein the optical sensor is configured to measure one or more properties of a flame at a contact between the at least one gas and a surface within the process chamber through the window; and a computing device to identify a contamination of the surface based on the one or more properties of the flame. ### Claim 10 (depends on 9) The system according to claim 9, wherein the surface comprises at least one of a surface of a wafer, a surface of a substrate support, or a surface of a process ring kit. ### Claim 11 (depends on 9) The system of claim 9, wherein the at least one gas comprises hydrogen, oxygen, or a combination thereof. ### Claim 12 (depends on 9) The system of claim 9, wherein the optical sensor comprises a spectrometer. ### Claim 13 (depends on 9) The system of claim 9, wherein the optical sensor comprises a filter, wherein the filter is configured to filter out wavelengths of light that are outside of a target wavelength associated with a specific type of contamination, and where the optical sensor is configured to measure an intensity of the flame based on filtered light that has been filtered by the filter. ### Claim 14 (depends on 13) The system of claim 13, wherein the target wavelength is selected from a range from 200 to 1000 nm. ### Claim 15 (depends on 13) The system of claim 13, wherein the target wavelength corresponds to a wavelength that is produced by iron contamination. ### Claim 16 A non-transistory computer readable medium having instructions thereon, which, when executed by a processing device, causes the processing device to receive one or more properties of a flame from an optical sensor from a processing chamber. ### Claim 17 (depends on 16) The non-transistory computer readable medium of claim 16, wherein the flame is at a contact region between a gas and a surface of the process chamber. ### Claim 18 (depends on 17) The non-transistory computer readable medium of claim 17, identifying a contamination of the surface based on the one or more properties of the flame. ### Claim 19 (depends on 18) The non-transistory computer readable medium of claim 18, wherein the identifying the contamination is based on wavelength of light of the flame as determined by the optical sensor. ### Claim 20 (depends on 19) The non-transistory computer readable medium of claim 19, further comprising alerting a user to the wavelength corresponding to the contamination.