Polymer, method of producing the same, resist composition including the polymer, and pattern formation method using the resist composition

A polymer, comprising:

• a first repeating unit represented by Formula 1;
• and
• a second repeating unit represented by Formula 2:
• wherein in Formulae 1 and 2,
• L11 is a single bond;
• O;
• S;
• C(—O);
• C(—O)O;
• OC(—O);
• C(═O)NR11;
• NR11C(═O);
• S(═O);
• S(═O)2O;
• OS(═O)2;
• or a linear, branched or cyclic C1-C30 divalent hydrocarbon group optionally including a heteroatom,
• a11 is an integer from 1 to 4,
• R11 is hydrogen;
• deuterium;
• a halogen atom;
• a cyano group;
• a nitro group;
• a hydroxyl group;
• an amino group;
• a carboxylate group;
• a thiol group;
• an ester moiety;
• a sulfonate moiety;
• a carbonate moiety;
• a lactone moiety;
• a sultone moiety;
• a carboxylic anhydride moiety;
• or a linear, branched or cyclic C1-C30 monovalent hydrocarbon group optionally including a heteroatom,
• X11 is hydrogen;
• deuterium;
• a halogen atom;
• a cyano group;
• a nitro group;
• a hydroxyl group;
• an amino group;
• a carboxylate group;
• a thiol group;
• an ester moiety;
• a sulfonate moiety;
• a carbonate moiety;
• a lactone moiety;
• a sultone moiety;
• a carboxylic anhydride moiety;
• or a linear, branched or cyclic C1-C30 monovalent hydrocarbon group optionally including a heteroatom,
• c11 is an integer from 1 to 10,
• Formula 1 optionally includes a plurality of X11 based on c11 being greater than 1, adjacent two of the plurality of X11 are optionally bound to each other to form a ring,
• Y21 is O, C(═O) or C(═O)O,
• Y22 is C(═O) or C(═O)O,
• n21 is 0 or 1,
• L21 is a single bond;
• O;
• S;
• C(═O);
• C(═O)O;
• OC(═O);
• C(═O)NR23;
• NR23C(═O);
• S(═O);
• S(═O)2O;
• OS(═O)2;
• or a linear, branched or cyclic C1-C30 divalent hydrocarbon group optionally including a heteroatom,
• L22 is a single bond;
• O;
• S;
• C(═O);
• C(═O)O;
• OC(═O);
• C(═O)NR24;
• NR24C(═O);
• S(═O);
• S(═O)2O;
• OS(═O)2;
• or a linear, branched or cyclic C1-C30 divalent hydrocarbon group optionally including a heteroatom,
• a21 and a22 are each independently an integer from 1 to 4,
• R21 to R24, X21, and X22 are each independently hydrogen;
• deuterium;
• a halogen atom;
• a cyano group;
• a nitro group;
• a hydroxyl group;
• an amino group;
• a carboxylate group;
• a thiol group;
• an ester moiety;
• a sulfonate moiety;
• a carbonate moiety;
• a lactone moiety;
• a sultone moiety;
• a carboxylic anhydride moiety;
• or a linear, branched or cyclic C1-C30 monovalent hydrocarbon group optionally including a heteroatom,
• c21 and c22 are each independently an integer from 1 to 10,
• Formula 2 optionally includes a plurality of X21 based on c21 being greater than 1, Formula 2 optionally includes a plurality of X22 based on c22 being greater than 1, and adjacent two of the plurality of X21 and the plurality of X22 are optionally bound to each other to form a ring,
• o21 is 0 or 1, and
• * is a bonding site with a neighboring atom.