Method and apparatus for determining settling of analog signal in semiconductor device testing

A semiconductor testing apparatus configured for detecting settling of an analog electrical signal during semiconductor device testing, the apparatus comprising:

• a semiconductor device tester configured to receive therein a device under test (DUT);
• an input signal source configured to provide an input signal to the DUT and a signal measurement sensor configured to measure the input signal, the signal measurement sensor configured to monitor for settling of an electrical signal by directly measuring the input signal;
• a detection circuitry configured to receive a measured input signal from the signal measurement sensor;
• and
• a non-transitory computer storage medium storing instructions that when executed by one or more processors, causes the one or more processors to perform operations comprising:
• tracking the measured input signal over time with sequential measurement windows that do not overlap with each other,
• wherein each measurement window spans a constant measurement period and a constant signal value range while shifting according to changes in the measured input signal such that each measurement window overlaps at least a portion of the measured input signal corresponding to a preceding measurement window;
• setting a settle count representing a number of consecutive and unshifted measurement windows having unshifted constant signal value ranges;
• and
• determining that a settle point has been reached upon detecting that the settle count has been met or exceeded by the measured input signal tracked by the sequential measurement windows.

A non-transitory computer storage medium storing instructions that when executed by one or more processors, cause the one or more processors to perform operations comprising:

• detecting in a semiconductor device tester a device under test (DUT) provided therein;
• providing an input signal to the DUT and measuring the input signal;
• tracking the measured input signal over time with sequential measurement windows overlapping the measured input signal,
• wherein each measurement window spans a constant measurement period and a constant signal value range while shifting according to changes in the input signal a first measurement window overlaps a first measured input signal value and consecutive measurement windows overlap an averaged value of input signal measurements of each preceding measurement window;
• setting a settle count representing a number of consecutive and unshifted measurement windows having unshifted constant signal value ranges;
• and
• determining that a settle point has been reached upon detecting that the settle count has been met or exceeded by the measured input signal tracked by the sequential measurement windows.