Accelerometer

An accelerometer, comprising a base, a sensing unit arranged on the base, and two anchor points fixed to the base and arranged at a same level as the sensing unit, wherein the two anchor points are arranged to be opposite to and apart from each other, and wherein the sensing unit includes:

• an outer coupling unit stacked on the base;
• two teeter-totter structures arranged to space apart from each other and on an inner side of the outer coupling unit, wherein the two teeter-totter structures are arranged to be in central symmetry;
• two inner coupling units arranged on the inner side of the outer coupling unit, wherein the two inner coupling units are arranged to be symmetrical about a line connecting the two anchor points and are respectively arranged on both sides of the two anchor points, and a teeter-totter structure of the two teeter-totter structures is elastically connected to the outer coupling unit, the two inner coupling units, and an other teeter-totter structure of the two teeter-totter structures;
• and
• detecting mass blocks fixed to the outer coupling unit and/or the two inner coupling units;
• wherein the accelerometer further includes two out-of-plane detection devices respectively arranged at an area on the base directly facing the outer coupling unit and at an area on the base directly facing the two inner coupling units, and wherein the two out-of-plane detection devices are configured to detect linear motion along a first direction generated by the outer coupling unit and/or the two inner coupling units using capacitive detection.