Microparticle measuring apparatus
AssigneeAdvantest Corporation
InventorsHiroshi SATO, Yasuharu IMAI, Nobuei WASHIZU
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Abstract
The microparticle measuring apparatus is used in combination with a pore-based device. The pore-based device has a first liquid chamber and a second liquid chamber separated by a partition having a pore. A measuring instrument is structured to measure a current signal that flows between a first electrode provided in the first liquid chamber and a second electrode provided in the second liquid chamber. Upon detection of the clogging of the pore-based device during the measurement, the pressure controller generates pressure difference between the first liquid chamber and the second liquid chamber.
Claims7
A microparticle measuring apparatus used in combination with a pore-based device,
- the pore-based device comprising a first liquid chamber and a second liquid chamber separated by a partition having a pore,
- the microparticle measuring apparatus comprising:
- a measuring instrument structured to measure a current signal that flows between a first electrode provided in the first liquid chamber and a second electrode provided in the second liquid chamber;
- a pressure controller structured to generate, in an operation mode, pressure difference between the first liquid chamber and the second liquid chamber;
- and
- a controller structured to detect clogging of the pore-based device based on the current signal, and structured to bring the pressure controller into the operation mode upon detection of the clogging.
Dependencies are inferred from the claim text.