Pure water production device
AssigneeKurita Water Industries Ltd.
InventorYasuharu MINATO
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Abstract
Provided is a pure water production device including an ultraviolet oxidation device for treating TOC components in water to be treated, in which an amount of water to be treated increases or decreases by 5 flow % or more with respect to a set value, and the pure water production device includes: a detection means for detecting an index directly or indirectly related to a concentration of H2O2 downstream or upstream of the ultraviolet oxidation device; and a control means for controlling an amount of ultraviolet rays in the ultraviolet oxidation device based on a detection value of the detection means.
Claims6
A pure water production device comprising an ultraviolet oxidation device for treating total organic carbon components in water to be treated, wherein an amount of water to be treated increases or decreases by 5 flow % or more with respect to a set value, and the pure water production device comprises:
- a detection means for detecting an index directly or indirectly related to a concentration of H2O2 downstream or upstream of the ultraviolet oxidation device;
- and a control means for controlling an amount of ultraviolet rays in the ultraviolet oxidation device based on a detection value of the detection means.
Dependencies are inferred from the claim text.