# US 2026/0091978 A1 · Method for preparing graphene film with micrometer groove array and triangular cross-section

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2026/0091978 A1
- Document ID: US20260091978A1
- Status: Published application
- Kind: A1
- Application number: 19/413,613
- Filed: 2025-12-09
- Published: 2026-04-02
- Earliest claimed: 2025-03-17
- Assignees: Guangdong University of Technology
- Applicants: Guangdong University of Technology
- Inventors: Huilong LIU; Yun CHEN; Xin CHEN; Zhiwen XIAO; Renji CHEN; Litian GAN; Xun CHEN; Ching-Ping WONG
- Web page: https://patentgrep.com/patent/US20260091978A1

## CPC

- C01B 32/184: Preparation
- C01B 32/194: After-treatment
- C01P 2004/03: obtained by SEM
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}
- C01P: INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS

## Abstract

A method for preparing a graphene film with a micrometer groove array and a triangular cross-section includes the following steps: A, subjecting a flexible sheet material to a pre-treatment, and obtaining a flexible sheet substrate; B, coating a carbon precursor material onto the flexible sheet substrate according to a required thickness of a solid carbon precursor, and conducting curing to obtain a flexible composite film loaded with the solid carbon precursor; where the carbon precursor material has a triazine ring network cross-linking structure; and C, adjusting laser parameters, and conducting direct-writing scanning on a surface of the solid carbon precursor with laser, followed by cleaning and drying to obtain the graphene film with a micrometer groove array and a triangular cross-section. The method solves the problems of current traditional processing techniques, which struggle to meet the high precision and three-dimensional requirements of a micro-scale/nano-scale structure of graphene films.

## Claims

### Claim 1

A method for preparing a graphene film with a micrometer groove array and a triangular cross-section, comprising following steps:
A, subjecting a flexible sheet material to a pre-treatment to obtain a flexible sheet substrate;
B, coating a carbon precursor material onto the flexible sheet substrate according to a required thickness of a solid carbon precursor, and conducting curing to obtain a flexible composite film loaded with the solid carbon precursor; wherein
the carbon precursor material has a triazine ring network cross-linking structure; and
C, adjusting laser parameters, and conducting direct-writing scanning on a surface of the solid carbon precursor with laser, followed by cleaning and drying to obtain the graphene film with a micrometer groove array and a triangular cross-section.

### Claim 2 (depends on 1)

The method according to claim 1, wherein in the step C, the laser parameters comprise: a wavelength of 200 nm to 360 nm, a pulse width less than 12 ps, a laser power of 3 W to 5 W, and conducting unidirectional overlapping linear scanning with laser in a defocusing manner; and
the unidirectional overlapping linear scanning with laser has a scanning spacing of 20% to 60% of a spot size, a defocusing amount of −2 mm to −8 mm, and a scanning speed of 20 mm/s to 150 mm/s.

### Claim 3 (depends on 1)

The method according to claim 1, wherein in the step B, the carbon precursor material is selected from the group consisting of a cyanate ester resin, a polytriazine polymer, and a conjugated triazine polymer; and
a thickness of the carbon precursor material is 40 μm to 150 μm.

### Claim 4 (depends on 1)

The method according to claim 1, wherein the flexible sheet material is selected from the group consisting of polyimide (PI), polyethylene terephthalate (PET), polyetherimide (PEI), polyethylene naphthalate (PEN), and MXene; a form of the flexible sheet material is selected from the group consisting of a flexible film material and a flexible paper-based material; and
a thickness of the flexible sheet material is 30 μm to 150 μm.

### Claim 5 (depends on 4)

The method according to claim 4, wherein in response to that the flexible sheet material is the flexible film material, the pre-treatment in the step A is hydrophilic treatment; a resulting pre-treated flexible sheet material has a contact angle of less than 90°; and
the hydrophilic treatment is selected from the group consisting of oxidation treatment, plasma treatment, surfactant coating, and laser engraving modification.

### Claim 6 (depends on 5)

The method according to claim 5, wherein in response to that the hydrophilic treatment is the laser engraving modification, the step A comprises following sub-steps:
placing the flexible sheet material at a focal position, and conducting grid patterning on the flexible sheet material with laser to complete the hydrophilic treatment; wherein
the laser has a wavelength of 200 nm to 360 nm, a pulse width less than 12 ps, a laser power of 6 W to 8 W, a laser scanning speed of 600 mm/s to 900 mm/s, and a scanning spacing of 60 μm to 100 μm.

### Claim 7 (depends on 5)

The method according to claim 5, wherein in the step B, the coating the carbon precursor material onto the flexible sheet substrate comprises:
attaching a mask to the flexible sheet substrate, wherein the mask is provided with an opening not smaller than a pre-treated area, the opening corresponds to the pre-treated area, and a thickness of the mask is identical to the required thickness of the solid carbon precursor; and
coating the carbon precursor material onto the pre-treated area, and scraping off an excess carbon precursor material to control the thickness of the carbon precursor material; wherein
the opening of the mask is obtained through one selected from the group consisting of physical cutting, photolithography, etching, and laser processing.

### Claim 8 (depends on 4)

The method according to claim 4, wherein in response to that the flexible sheet material is the flexible paper-based material, the pre-treatment in the step A is selected from the group consisting of immersion, coating, and spin coating.

### Claim 9 (depends on 8)

The method according to claim 8, wherein in the step B, the coating the carbon precursor material onto the flexible sheet substrate comprises:
completely dissolving the carbon precursor material in a solvent to obtain a carbon precursor solution; and
spin-coating the carbon precursor solution onto the flexible sheet substrate to the required thickness of the solid carbon precursor using a spin coater.

### Claim 10 (depends on 1)

The method according to claim 1, wherein in the step C, an atmosphere for the laser is selected from the group consisting of an air atmosphere, an inert gas protective atmosphere, an oxygen and inert gas mixture environment, and a vacuum environment.
