Substrate processing device and method for removing bubbles from filter

Abstract

A substrate processing apparatus is provided with a substrate processor a piping, a filter, an upstream-side piping, a downstream-side piping, and a removing liquid supply. The substrate processor processes a substrate W. The piping allows a processing liquid to flow therethrough toward the substrate processor. The filter is disposed in the piping. The upstream-side piping is connected to the piping at the upstream side of the filter. The downstream-side piping is connected to the piping at the downstream side of the filter. The removing liquid supply supplies a bubble removing liquid to one of the upstream-side piping and the downstream-side piping. The substrate processing apparatus allows the bubble removing liquid to pass from the one of the upstream-side piping and the downstream-side piping via the filter to the other of the upstream-side piping and the downstream-side piping.

Dependencies are inferred from the claim text.