METHOD FOR PREPARING MID-INFRARED FOCAL PLANE DETECTOR BASED ON Sn-DOPED PbSe QUANTUM DOTS
AssigneeSun Yat-Sen University
InventorsZhaohui LI, Yifan CHEN
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AssigneeSun Yat-Sen University
InventorsZhaohui LI, Yifan CHEN
Estimating the term…
The present invention relates to the technical field of thermal imaging of mid-infrared focal plane detectors, and more particularly relates to a method for preparing a mid-infrared focal plane detector based on Sn-doped PbSe quantum dots. The mid-infrared focal plane detector is prepared on a readout integrated circuit (ROIC) substrate, and is composed of an Au bottom electrode, a PbS hole transport layer, a Sn-doped PbSe photosensitive layer, and a PIN heterojunction of a ZnO electron transport layer sequentially constructed by an ion beam sputtering method, a spin-coating method, a spin-coating method, and an ion beam sputtering method, respectively, and an indium tin oxide (ITO) top electrode finally evaporated by an ion beam sputtering method.
A method for preparing a mid-infrared focal plane detector based on Sn-doped PbSe quantum dots, comprising the following steps:
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