# US 2026/0090118 A1 · Solid-state imaging device

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- Number: US 2026/0090118 A1
- Document ID: US20260090118A1
- Status: Published application
- Kind: A1
- Application number: 19/054,397
- Filed: 2025-02-14
- Published: 2026-03-26
- Earliest claimed: 2024-09-24
- Assignees: Kabushiki Kaisha Toshiba; Toshiba Electronic Devices & Storage Corporation
- Applicants: Kabushiki Kaisha Toshiba; Toshiba Electronic Devices & Storage Corporation
- Inventors: Minoru KASHIWAGI
- Web page: https://patentgrep.com/patent/US20260090118A1

## CPC

- H10F 39/8023: {Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery}
- H10F 39/8063: {Microlenses}
- H10F 39/8053: {Colour filters}
- H10F 39/811: {Interconnections}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

According to one embodiment, a solid-state imaging device includes: a plurality of pixels provided on a substrate and arranged in a first direction and a second direction that are parallel to a surface of the substrate and intersect with each other; and a plurality of microlenses provided above the substrate, wherein each of the plurality of microlenses has a semi-cylindrical or semi-elliptic cylindrical structure extending in the first direction.

## Claims

### Claim 1

A solid-state imaging device comprising:
a plurality of pixels provided on a substrate and arranged in a first direction and a second direction that are parallel to a surface of the substrate and intersect with each other; and
a plurality of microlenses provided above the substrate, wherein
each of the plurality of microlenses has a semi-cylindrical or semi-elliptic cylindrical structure extending in the first direction.

### Claim 2 (depends on 1)

The solid-state imaging device according to claim 1, wherein
each of the plurality of microlenses includes a curved surface in the second direction.

### Claim 3 (depends on 1)

The solid-state imaging device according to claim 1, further comprising:
an interconnect provided between the plurality of pixels and the plurality of microlenses in a third direction perpendicular to the surface of the substrate and having a plurality of openings, wherein
a first opening of the openings overlaps a first pixel of the plurality of pixels in the third direction,
a dimension of the first opening along the first direction is equal to or less than a dimension of the pixel along the first direction, and
a dimension of the first opening along the second direction is less than a dimension of the pixel along the second direction.

### Claim 4 (depends on 3)

The solid-state imaging device according to claim 3, wherein
each of the plurality of microlenses includes a first end having a curved surface in the first direction, and
the first end overlaps the interconnect in the third direction and is separated from ends of the plurality of pixels.

### Claim 5 (depends on 1)

The solid-state imaging device according to claim 1, wherein
each of the plurality of microlenses is arranged in the second direction,
the plurality of microlenses include a first microlens and a second microlens adjacent to each other in the second direction, and
a curved surface of the first microlens faces a curved surface of the second microlens in the second direction.

### Claim 6 (depends on 1)

The solid-state imaging device according to claim 1, wherein
each of the plurality of microlenses is arranged in the first direction and the second direction, and
each of the plurality of microlenses overlaps each of the plurality of pixels in a third direction perpendicular to the surface of the substrate.

### Claim 7 (depends on 6)

The solid-state imaging device according to claim 6, further comprising
a color filter provided between the plurality of microlenses and the plurality of pixels in the third direction perpendicular to the surface of the substrate and including a first filter corresponding to a first wavelength band, a second filter corresponding to a second wavelength band, and a third filter corresponding to a third wavelength band, wherein
the first filter, the second filter, and the third filter extend in the second direction,
the first filter, the second filter, and the third filter are arranged in the first direction,
each of first microlenses arranged in the second direction among the plurality of microlenses is provided above each of first pixels arranged in the second direction among the plurality of pixels with the first filter interposed therebetween,
each of second microlenses arranged in the second direction among the plurality of microlenses is provided above each of second pixels arranged in the second direction among the plurality of pixels with the second filter interposed therebetween, and
each of third microlenses arranged in the second direction among the plurality of microlenses is provided above each of third pixels arranged in the second direction among the plurality of pixels with the third filter interposed therebetween.

### Claim 8 (depends on 1)

The solid-state imaging device according to claim 1, wherein
each of the plurality of microlenses overlaps first pixels arranged in the first direction among the plurality of pixels in a third direction perpendicular to the surface of the substrate.

### Claim 9 (depends on 1)

The solid-state imaging device according to claim 1, further comprising
a color filter provided between the plurality of microlenses and the plurality of pixels in a third direction perpendicular to the surface of the substrate and including a first filter corresponding to a first wavelength band, a second filter corresponding to a second wavelength band, and a third filter corresponding to a third wavelength band, wherein
the first filter, the second filter, and the third filter extend in the second direction,
the first filter, the second filter, and the third filter are arranged in the first direction, and
a first microlens among the plurality of microlenses is provided above first pixels arranged in the first direction among the plurality of pixels with the first filter, the second filter, and the third the filter interposed therebetween.

### Claim 10 (depends on 1)

The solid-state imaging device according to claim 1, further comprising
a color filter provided between the plurality of microlenses and the plurality of pixels in a third direction perpendicular to the surface of the substrate and including a first filter corresponding to a first wavelength band, a second filter corresponding to a second wavelength band, and a third filter corresponding to a third wavelength band, wherein
the first filter, the second filter, and the third filter extend in the first direction,
the first filter, the second filter, and the third filter are arranged in the second direction, and
a first microlens among the plurality of microlenses is provided above first pixels arranged in the first direction among the plurality of pixels with the first filter interposed therebetween.

### Claim 11 (depends on 10)

The solid-state imaging device according to claim 10, further comprising:
an interconnect provided between the plurality of pixels and the color filter in the third direction and having a plurality of openings, wherein
a first opening among the openings extends in the first direction, and
the first opening is provided above the first pixels in the third direction.

### Claim 12 (depends on 11)

The solid-state imaging device according to claim 11, wherein
a dimension of the first opening along the first direction is equal to or greater than a sum of dimensions of the first pixels along the first direction.

### Claim 13 (depends on 1)

The solid-state imaging device according to claim 1, wherein
each of the plurality of microlenses includes a flat upper end as viewed from the second direction.

### Claim 14 (depends on 1)

The solid-state imaging device according to claim 1, wherein
each of the plurality of microlenses has a quadrilateral structure as viewed from the second direction.

### Claim 15 (depends on 1)

The solid-state imaging device according to claim 1, wherein
a first end of each of the plurality of microlenses in the first direction has a curved structure.

### Claim 16 (depends on 1)

The solid-state imaging device according to claim 1, wherein
each of the plurality of microlenses has a dome-like structure as viewed from the first direction.
