US 2026/0086500 A1 · Variable Gradient Thickness Coating

Abstract

A coating device comprising a sample carrier, a source, shadow mask and coating driver. The source comprises a plurality of targets such as a first target and second target. The source is arranged to coat at least one sample housed in the sample carrier. The shadow mask is disposed in a line-of-sight between the sample carrier and source. The shadow mask is arranged such that the first target provides a first coating contribution. The shadow mask is further arranged such that the second target provides a second coating contribution. The second coating contribution is different to the first coating contribution. At least one of the first and second coating contributions is non-uniform in a first dimension of the sample. The coating driver is arranged to independently control the first coating contribution and second coating contribution such that a thickness gradient of the coating in the first direction is variable.

Claims16

Dependent claims

A coating device comprising:

a sample carrier;
a source comprising a first target and a second target, wherein the source is arranged to coat a sample housed in the sample carrier;
a shadow mask disposed between the sample carrier and source, wherein the shadow mask is arranged such that the first target provides a first coating contribution and the second target provides a second coating contribution different to the first coating contribution, wherein at least one of the first and second coating contributions is non-uniform in a first dimension of the sample;
and
a coating driver arranged to independently control the first coating contribution and second coating contribution such that a thickness gradient of the coating in the first direction is variable.

2 more elements

Dependencies are inferred from the claim text.

Variable Gradient Thickness Coating

Life of this patent

Variable Gradient Thickness Coating

Life of this patent

Abstract

Claims16