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US 2026/0086459 A1Published application
Onium salt, chemically amplified positive resist composition and resist pattern forming process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsMasahiro Fukushima, Satoshi Watanabe, Masaaki Kotake, Yuta Matsuzawa, Keiichi Masunaga, Yoshito Hirokawa
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Abstract
An onium salt having a substituent group on the carbon atom adjoining the sulfo group in the anion and containing a triarylbenzene or diarylbenzene structure generates an acid with adequate strength and controlled diffusion. A chemically amplified positive resist composition comprising the onium salt has a high resolution and forms a pattern with reduced LER.
Claims18
An onium salt having the formula (A):
- wherein n1 is 0 or 1, n2 is 0, 1, 2, 3 or 4, n3 is 1, 2, 3 or 4, n4 is 0 or 1, n5 is 0, 1, 2, 3 or 4, n6 is 0, 1, 2, 3 or 4;
- n1 to n3 are in the range:
- 1≤n2+n3≤5 when n1=0, and 1≤n2+n3≤7 when n1=1,
- R1 is a C1-C20 hydrocarbyl group,
- R2 is halogen, nitro, cyano, hydroxy, carboxy, a C1-C20 hydrocarbyl group which may contain a heteroatom, C1-C20 hydrocarbyloxy group which may contain a heteroatom, C1-C20 hydrocarbylthio group which may contain a heteroatom, or C1-C20 hydrocarbyloxycarbonyl group which may contain a heteroatom;
- when n2 is 2, 3 or 4, a plurality of R2 may be identical or different and a plurality of R2 may bond together to form a ring with the carbon atoms to which they are attached,
- R3 is halogen, nitro, cyano, hydroxy, carboxy, a C1-C20 hydrocarbyl group which may contain a heteroatom, C1-C20 hydrocarbyloxy group which may contain a heteroatom, C1-C20 hydrocarbylthio group which may contain a heteroatom, C1-C20 hydrocarbyloxycarbonyl group which may contain a heteroatom, or C1-C20 hydrocarbylcarbonyloxy group which may contain a heteroatom;
- when n5 is 2, 3 or 4, a plurality of R3 may be identical or different and a plurality of R3 may bond together to form a ring with the carbon atoms to which they are attached,
- R4 is halogen, nitro, cyano, hydroxy, a C1-C20 hydrocarbyl group which may contain a heteroatom, C1-C20 hydrocarbyloxy group which may contain a heteroatom, or C1-C20 hydrocarbylthio group which may contain a heteroatom;
- when n6 is 2, 3 or 4, a plurality of R4 may be identical or different and a plurality of R4 may bond together to form a ring with the carbon atoms to which they are attached,
- LA, LB and LC are each independently a single bond, ether bond, ester bond, sulfonate ester bond, amide bond, sulfonamide bond, carbonate bond or carbamate bond,
- XL1 is a single bond or a C1-C40 hydrocarbylene group which may contain a heteroatom, and
- Z+ is an onium cation.
10 more elements
Dependencies are inferred from the claim text.