Resist composition, method for forming resist pattern, compound, and polymer compound
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsIssei SUZUKI, Akiya FUJINO, Ryota KOBAYASHI, Tetsuya MATSUSHITA, KhanhTin NGUYEN, Tetsuo FUJINAMI, Seiji TODOROKI, Yohei ADACHI
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