Extension of a circuit for inertial sensors for the detection, calibration and dynamic correction of squeeze film damping and restoring effects during high-load operation

A method for operating a micromechanical inertial sensor having a sensor element movably arranged in a cavity, wherein the micromechanical inertial sensor has a detection device configured to detect a measurement signal depending on a deflection of the sensor element along a detection direction from a starting position, wherein the detection device can detect comparatively small deflections up to a geometric full deflection of the sensor element parallel to the detection direction, wherein the detection device further has a comparatively large mechanical deflection of the sensor element parallel to the detection direction brought about by an additional static test voltage or a square-wave voltage via a first electrode structure, wherein the first electrode structure is arranged opposite the sensor element along the detection direction, and between the sensor element and the first electrode structure, using an applied electrical voltage, a variable capacitance is formed, wherein a gaseous medium is located in the cavity, which medium influences movements of the sensor element, the method comprising the following steps:

• realizing a large deflection of the sensor element along the detection direction using a test voltage;
• and
• detecting an influence of the gaseous medium in a region between the sensor element and the first electrode structure, using the measurement signal.