US 2026/0086050 A1Published application

X-ray fluorescence analyzer

AssigneeHitachi High-Tech Analysis Corporation

InventorsYuki KANAZAWA, Oleg SHIROKOBROD, Masaki TATSUMI, Masaki IZUMIYAMA

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Abstract

An objective is to perform sample analysis at high speed by incorporating optical geometrical factors of an optical system in fluorescence X-ray analysis/A fluorescence X-ray analysis apparatus includes an X-ray source that irradiates a sample with primary X-rays, a detector (measurement means) that obtains a measured intensity of secondary X-rays, a controller (theoretical intensity calculation unit) that calculates theoretical intensity of the secondary X-rays based on an assumed composition, and a controller (calculation unit) that calculate a composition by modifying calculation of the assumed composition in successive approximation so that the measured intensity matches theoretical intensity, wherein the controller calculates a theoretical intensity by multiplying by detection efficiency of the fluorescence X-rays, which depends on a sample depth from the surface of the sample irradiated with the primary X-rays to the point inside the sample where the secondary X-rays are generated.

Claims6

Dependent claims

An X-ray fluorescence analyzer for analyzing a sample, comprising:

an X-ray source configured to irradiate a sample with primary X-rays;
a unit configured to measure intensity of secondary X-rays generated from the sample;
a theoretical intensity calculation unit configured to calculate theoretical intensity of secondary X-rays generated from each element in the sample based on an assumed composition;
and
a calculation unit configured to calculate a composition of the sample by modifying calculation of the assumed composition in successive approximation so that the theoretical intensity matches the intensity of the secondary X-rays that was measured,
wherein the theoretical intensity calculation unit calculates the theoretical intensity based on a product of detection efficiency of the fluorescence X-rays depending on a sample depth, intensity of the primary X-rays, and X-ray generation efficiency of quantitative elements, the sample depth being a distance from a surface of the sample irradiated with the primary X-rays to a point inside the sample where the secondary X-rays are generated;
and
detection efficiency of the fluorescence X-rays is obtained in advance and stored to be used for a plurality of sample analyses.

5 more elements

Dependencies are inferred from the claim text.