Measurement device

Abstract

A measurement device includes a radiation unit that houses inside a charged particle radiation source; a detection unit that houses inside a detection device that detects charged particle radiation radiated from the charged particle radiation source and that is arranged with a clearance between the detection unit and the radiation unit; and a magnetic field generator that generates a magnetic field from a side of one of the radiation unit and the detection unit toward a side of the other between the radiation unit and the detection unit and, in the radiation unit, an output port that allows the charged particle radiation radiated from the charged particle radiation source to be output to outside is formed in a position opposed to the detection unit, and, in the detection unit, an incidence port that allows the charged particle radiation to be incident on the inside is formed in a position opposed to the output port.

Dependencies are inferred from the claim text.