Pvt method and apparatus for producing single crystals in a safe process
AssigneePVA TePla AG
InventorsTomas BAUMECKER, Karsten VIEHMANN, Lorenz VOGEL, Michael SCHÖLER, Lukas EWERT, Tobias ECKER
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Abstract
An apparatus for process-safe production of single crystals includes a process chamber that is fillable with a process gas and that receives a heatable growth cell, a heating device for heating the growth cell, which is adapted to receive a source material and a seed, and a vessel at least radially enclosing the process chamber and comprising at least first and second segments. A related method is also disclosed.
Claims24
PVT method for process-safe production of single crystals in an apparatus, wherein the apparatus comprises a process chamber for receiving a heatable growth cell and a heating device for heating the growth cell, wherein the growth cell is adapted to receive a source material and a seed, and wherein the process chamber is fillable with a process gas and the growth cell is heatable, wherein the apparatus comprises a segmented containment vessel enclosing the process chamber, and wherein the containment vessel has at least first and second segments, the segments as a whole enclosing the process chamber at least radially so that an interspace is provided between the segments of the containment vessel and the process chamber, the PVT method comprising the steps of
- providing a protective atmosphere in the interspace and therefore flooding the interspace with the protective atmosphere,
- providing the process gas in the process chamber,
- heating the growth cell using the heating device so that the source material sublimates and resublimates at the seed.
An apparatus for process-safe production of single crystals, comprising
- a process chamber for accommodating a highly heatable growth cell, and
- a heating device for heating the growth cell,
- wherein the process chamber has a process gas connection for filling the process chamber with a process gas which can be provided from a process gas source,
- wherein the growth cell is adapted to receive a source material and a seed,
- the apparatus further comprising a segmented vessel wall enclosing the process chamber at least radially on all sides, the vessel wall comprising a plurality of at least two wall segments.
Dependencies are inferred from the claim text.