Structural member

Abstract

Provided is a structural member with sufficient durability against plasma while having a protective film that can be easily removed from the base material. The structural member 10 includes a base material 100 which is a ceramic sintered body, and a protective film 200 covering the surface 110 of the base material 100. The protective film 200 includes, as a main component, any one selected from the group consisting of an alkaline earth metal oxide, an alkaline earth metal fluoride, and an alkaline earth metal acid fluoride, and has an indentation hardness of 8 GPa or less.

Dependencies are inferred from the claim text.