Triaxial microelectromechanical gyroscope with improved performances

A method of operating a MEMS gyroscope comprising a microelectromechanical structure having first, second, third, and fourth driving masses, first and second pitch sensing masses, first and second roll sensing masses, and first and second pairs of yaw sensing masses, the method comprising:

• driving the first, second, third, and fourth driving masses to perform translational movements in phase-opposition for each pair along a second horizontal axis, wherein the translational movements of the first, second, third, and fourth driving masses symmetrical to each other with respect to a first axis of symmetry are also in phase-opposition;
• causing, due to the translational movements of the first, second, third, and fourth driving masses:
• a rotation in phase-opposition of the first and second roll sensing masses in a horizontal plane around respective axes parallel to a vertical axis;
• a translational movement in phase-opposition of the first and second pairs of yaw sensing masses along the second horizontal axis;
• and
• a rotation in phase-opposition of the first and second pitch sensing masses around respective axes parallel to the vertical axis;
• detecting a pitch angular velocity around the first horizontal axis by sensing rotation movements of the first and second pitch sensing masses outside the horizontal plane around respective rotation axes parallel to the second horizontal axis;
• detecting a roll angular velocity around the second horizontal axis by sensing rotation movements of the first and second roll sensing masses outside the horizontal plane;
• and
• detecting a yaw angular velocity around the vertical axis by sensing displacement movements of the first and second pairs of yaw sensing masses along the first horizontal axis.