Liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsHarunobu KOIKE, Motoki TAKABE, Nobuaki ITO
Life of this patent
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Abstract
A liquid ejecting head includes, stacked in this order from a lower side to an upper side along a stacking direction intersecting an arrangement direction and an extending direction intersecting the arrangement direction: a pressure chamber substrate, a diaphragm, a first common electrode, a first thin film piezoelectric body, a first individual electrode, an insulating layer, a second individual electrode, a second thin film piezoelectric layer, and a second common electrode. The first and second individual electrodes are blocked by the insulating layer in a region where the first and second individual electrodes overlap the pressure chamber when viewed in the stacking direction.
Claims11
A liquid ejecting head, comprising, stacked in this order from a lower side to an upper side along a stacking direction intersecting an arrangement direction and an extending direction intersecting the arrangement direction:
- a pressure chamber substrate in which a plurality of pressure chambers are provided to be arranged in the arrangement direction;
- a diaphragm;
- a first common electrode which is commonly provided for the plurality of pressure chambers and to which a reference voltage that does not change over time is applied;
- a first thin film piezoelectric body;
- a first individual electrode which is individually provided for the plurality of pressure chambers so as to extend in the extending direction and to which a driving voltage that changes over time is applied;
- an insulating layer;
- a second individual electrode which is individually provided for the plurality of pressure chambers so as to extend in the extending direction and to which the driving voltage that changes over time is applied;
- a second thin film piezoelectric body;
- and
- a second common electrode which is commonly provided for the plurality of pressure chambers and to which the reference voltage is applied,
- wherein the first individual electrode and the second individual electrode are blocked by the insulating layer in a first region where the first individual electrode and the second individual electrode overlap the pressure chamber when viewed in the stacking direction.
Dependencies are inferred from the claim text.