Improved saw-sensor with thin piezoelectric layer and osmotic sensor device including the same
OwnerMichael HUTHinventor
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Abstract
A SAW sensor comprising: a substrate, a piezoelectric layer deposited on the substrate, an input IDT configured for converting input electric signals into surface acoustic waves, and an output IDT configured for converting said surface acoustic waves into output electric signals, wherein the input IDT and the output IDT are arranged on the piezoelectric layer. TAn osmotic sensor device for measuring a property of a body fluid comprising a cavity for confining a fluid, a membrane for allowing osmotic diffusion into and/or from the cavity, and such SAW sensor. A method of manufacturing such SAW sensor comprising depositing the piezoelectric layer on the substrate by means of a deposition process.
Claims22
1-29. (canceled)
A surface acoustic wave, SAW, sensor comprising:
- a substrate,
- a piezoelectric layer deposited on the substrate,
- an input interdigital transducer, IDT, configured for converting input electric signals into surface acoustic waves, and an output IDT configured for converting said surface acoustic waves into output electric signals, wherein the input IDT and the output IDT are arranged on the piezoelectric layer.
39-51. (canceled)
An osmotic sensor device for measuring a property of a body fluid, the sensor device comprising:
- a cavity for confining therein a fluid;
- a membrane for allowing osmotic diffusion into and/or from the cavity;
- and
- a SAW sensor configured for sensing an osmotic pressure in the cavity, the SAW sensor comprising:
- a substrate;
- a piezoelectric layer deposited on the substrate;
- an input interdigital transducer, IDT, configured for converting input electric signals into surface acoustic waves, and an output IDT configured for converting said surface acoustic waves into output electric signals, wherein the input IDT and the output IDT are arranged on the piezoelectric layer.
A method of manufacturing a SAW sensor, the method comprising:
- providing a substrate;
- depositing a piezoelectric layer on the substrate by means of a deposition process;
- and
- arranging one or more interdigital transducers, IDT, on the piezoelectric layer, wherein the deposition process is a physical deposition process.
Dependencies are inferred from the claim text.