Semiconductor manufacturing tool
OwnerHiroyuki ODEinventor
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Abstract
According to one embodiment, there is provided a semiconductor manufacturing tool that is capable of further facilitating an electrochemical process. The semiconductor manufacturing tool according to the embodiment includes a plurality of process baths, an anode and a cathode, and an electrical circuit. Each of the plurality of process baths is capable of containing a substrate processing liquid and a first substrate. The anode and the cathode are provided for each of the process baths. The electrical circuit electrically connects a plurality of first substrates held in the substrate processing liquid via the anode and the cathode and supplies electrical power via the anode and the cathode for subjecting the plurality of first substrates to an electrochemical process.
Claims20
A semiconductor manufacturing tool, comprising:
- a plurality of process baths, each of which is capable of containing a substrate processing liquid and accommodating a first substrate;
- a plurality of anodes and a plurality of cathodes, wherein one of the anodes and one of the cathodes are provided for each of the process baths;
- and
- an electrical circuit configured to electrically connect a plurality of first substrates accommodated in the process baths and in the substrate processing liquid, via the anodes and the cathodes, and supplies electrical power via the anodes and the cathodes to subject the first substrates to an electrochemical process.
A method of batch processing a plurality of semiconductor wafers in a semiconductor manufacturing tool that includes a plurality of process baths, each of which is capable of containing a processing liquid, said method comprising:
- placing a plurality of first electrodes respectively in the processing baths;
- securing a plurality of semiconductor wafers respectively to a plurality of second electrodes provided on a substrate holder;
- moving the substrate holder to place the plurality of semiconductor wafers and the plurality of second electrodes respectively in the process baths;
- supplying electrical power via the first electrodes and the second electrodes to subject the semiconductor wafers to an electrochemical process.
Dependencies are inferred from the claim text.