Mapping device and load port apparatus
AssigneeTDK Corporation
InventorsKodai SATO, Tomoshi ABE, Tatsuhiro KOTSUGAI
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AssigneeTDK Corporation
InventorsKodai SATO, Tomoshi ABE, Tatsuhiro KOTSUGAI
Estimating the term…
A mapping device capable of detecting a stored state of a square shaped plate-form object including: a first detection part having a first detection axis which crosses a first side and a second side perpendicular to the first side object to detect a first corner thickness; a second detection part having a second detection axis which crosses the first and third sides of the object to detect a second corner thickness; a first information acquiring unit acquiring a first information relating to a warpage amount in the first direction of the object; an adjustment calculation unit calculating an adjusted detection value relating to the thickness of the object in the first direction by adjusting, based on the first information, a sum of the first and second corner thicknesses or an average thereof; and a distinguishing unit distinguishing the stored state of the object using the adjusted detection value.
A mapping device capable of detecting a stored state of a square shaped plate-form object comprising a plurality of square shaped plate-form objects stored in a container capable of storing the square shaped plate-form objects along a first direction while taking a space between each of the square shaped plate-form objects, comprising:
Dependencies are inferred from the claim text.