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AssigneeChangchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
InventorsSicong TIAN, Dieter BIMBERG, Mansoor Ahamed MOHAMMED ALTHOF MARICAR
Estimating the term…
Radiation emitter and method of fabricating radiation emitters includes the steps of fabricating a lower layer stack on top of a substrate, the lower layer stack comprising a lower contact layer and at least one lower reflector, fabricating an intermediate layer stack on top of the lower layer stack, the intermediate layer stack comprising at least one active layer and at least one aperture layer, fabricating an upper layer stack on top of the intermediate layer stack, the upper layer stack comprising at least one upper reflector and an upper contact layer, and forming a mesa that at least comprises a mesa section of the upper layer stack, by locally removing at least the upper layer stack. After or before forming the mesa, at least one blind hole having a depth smaller than the thickness of the upper layer stack is etched inside the mesa section of the upper layer stack, and the at least one blind hole is filled with a thermally conductive material.
Method of fabricating a radiation emitter (100) comprising the steps of
Radiation emitter comprising a mesa (50) that includes at least a mesa section of an upper layer stack (40),
Dependencies are inferred from the claim text.