Chip navigation using virtual map including sample navigation based on hand-drawn or digitially generated images

Abstract

A computer-implemented method, comprising accessing an image of a sample, detecting one or more shapes in the image, constructing a virtual map based on the detected one or more shapes in the image and a set of virtual map construction rules, and based on the virtual map, automatically navigating to a target region of the sample to process the sample with a charged particle beam microscope. Another method includes accessing dynamically obtained shape data associated with an image of a sample, detecting one or more shapes in the image and converting the detected one or more shapes into found shape data, accessing artificial reference shape data, comparing the found shape data and the artificial reference shape data with an object matching optimization to determine an alignment between the found shape data and the artificial reference shape data, and navigating to a target region of the sample based on the alignment.

Dependencies are inferred from the claim text.