Methods of performing 3d metrology on a structure
OwnerLi WANG, Miao WANG +2inventors
InventorsLi WANG, Miao WANG, Yukun SUN, Da LI
Life of this patent
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Abstract
A method of performing 3D metrology on a structure includes directing an electron beam onto a surface of the structure, capturing a first set of images of the structure at a first landing angle, capturing a second set of images of the structure at a second landing angle, the second landing angle being different from the first landing angle, and determining, by comparing the first set of images to the second set of images, at least one 3D parameter of the structure. The first set of images at the first landing angle and the second set of images at the second landing angle are captured in a single run of the electron beam across the surface of the structure.
Claims20
A method of performing 3D metrology on a structure, the method comprising:
- directing an electron beam onto a surface of the structure;
- capturing a first set of images of the structure at a first landing angle;
- capturing a second set of images of the structure at a second landing angle, the second landing angle being different from the first landing angle;
- and
- determining, by comparing the first set of images to the second set of images, at least one 3D parameter of the structure;
- wherein the first set of images at the first landing angle and the second set of images at the second landing angle are captured in a single run of the electron beam across the surface of the structure.
A method of performing 3D metrology on a structure, the method comprising:
- defining a main field on at least a portion of a surface of the structure, the structure including at least one array of 3D structures;
- defining a plurality of subfields within the main field;
- deflecting an electron beam across each of the plurality of subfields defined within the main field;
- determining a subfield landing angle in each of the plurality of subfields;
- capturing a first set of images of the at least one contact hole at a first landing angle, the first landing angle being equal to the subfield landing angle of at least one of the plurality of subfields;
- capturing a second set of images of the at least one contact hole at a second landing angle, the second landing angle being equal to the subfield landing angle of another one of the at least one the plurality of subfields, such that the second landing angle is different from the first landing angle;
- and
- determining, by comparing the first set of images to the second set of images, at least one 3D parameter of the at least one array of 3D structures.
A method of performing 3D metrology on a structure, the method comprising:
- defining a main field on at least a portion of a surface of the structure, the structure including at least one array of 3D structures;
- defining a plurality of subfields within the main field;
- deflecting an electron beam across each of the plurality of subfields defined within the main field;
- determining a subfield landing angle in each of the plurality of subfields;
- capturing a first set of images of the at least one array of 3D structures at a first landing angle, the first landing angle being equal to the subfield landing angle of at least one of the plurality of subfields;
- capturing a second set of images of the at least one array of 3D structures at a second landing angle, the second landing angle being equal to the subfield landing angle of another one of the at least one the plurality of subfields, such that the second landing angle is different from the first landing angle;
- determining, by comparing the first set of images to the second set of images, at least one 3D parameter of the at least one array of 3D structures;
- generating a landing angle distribution map of the subfield landing angle in each of the plurality of subfields;
- and
- determining at least one second 3D parameter of a second array of 3D structures formed on a second structure, wherein the at least one second 3D parameter is determined by accessing and referencing the landing angle distribution map.
Dependencies are inferred from the claim text.