Method for producing a metal-based coating on a film of harm-structures attached to a support
AssigneeCanatu Finland Oy
InventorAhmed Soliman
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AssigneeCanatu Finland Oy
InventorAhmed Soliman
Estimating the term…
A method for producing a metal-based coating on a film of high aspect ratio molecular structures (HARM-structures) attached to a support, wherein the method comprises: providing an electrode comprising a film of HARM-structures attached to a support, wherein the support is provided with a current collector; subjecting the electrode to an electrodeposition process in an aqueous deposition bath of a metal complex and/or a salt thereof, wherein the electrodeposition process comprises: conducting the electrode-position at a first potential value being in the range of 0.2 to 5 V to form the metal-based coating on the film of HARM-structures attached to the support; and then conducting the electrodeposition at a second potential value being in the range of 0 to −4 V to etch the formed metal-based coating.
A method for producing a metal-based coating on a film of high aspect ratio molecular structures (HARM-structures) attached to a support, wherein the method comprises:
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16-24. (canceled)
A filter, comprising:
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31-43. (canceled)
An extreme ultraviolet lithography (EUV) pellicle, comprising:
Dependencies are inferred from the claim text.