Silicon nitride substrate and silicon nitride substrate production method
AssigneeNiterra Materials Co., Ltd.
InventorKeita KANAHARA
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AssigneeNiterra Materials Co., Ltd.
InventorKeita KANAHARA
Estimating the term…
A silicon nitride substrate includes major layers and intermediate layers. m+1 of the major layers and m of the intermediate layers are alternately arranged in a thickness direction. A color difference between an nth major layer and an nth intermediate layer from one surface (n being an integer) is taken as CDna. A color difference between a (n+1)th major layer and the nth intermediate layer is taken as CDnb. A first condition and a second condition are satisfied for all values of n from 1 to m. The first condition is when there is a continuous region having a length of not less than 100 μm in a first direction in which 0.1≤CDna≤1.4. The second condition is when there is a continuous region having a length of not less than 100 μm in the first direction in which 0.1≤CDnb≤1.4.
A silicon nitride substrate, comprising:
A silicon nitride substrate production method, comprising:
Dependencies are inferred from the claim text.