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US 2026/0077451 A1Published application
Dresser and method of manufacturing the same
AssigneeKioxia Corporation
InventorsShuntaro YAMASHITA, Momoka OTANI
Life of this patent
Estimating the term…
Abstract
In one embodiment, a dresser includes a substrate. The dresser further includes a first layer provided on the substrate. The dresser further includes at least one convex portion provided on the substrate or the first layer, having an upper end that is higher than an upper face of the first layer, and having a composition that is different from a composition of the first layer. The dresser further includes a second layer provided on the at least one convex portion.
Claims20
A dresser comprising:
- a substrate;
- a first layer provided on the substrate;
- at least one convex portion provided on the substrate or the first layer, having an upper end that is higher than an upper face of the first layer, and having a composition that is different from a composition of the first layer;
- and
- a second layer provided on the at least one convex portion.
2 more elements
A method of manufacturing a dresser, comprising:
- forming a first layer on a substrate;
- forming, on the substrate or the first layer, a third layer having a composition that is different from a composition of the first layer;
- etching the third layer until the first layer is exposed, to form at least one convex portion from the third layer;
- and
- forming a second layer on the at least one convex portion.
2 more elements
A method of manufacturing a dresser, comprising:
- preparing a wafer including a substrate, a first layer provided on the substrate, and at least one convex portion provided on the substrate or the first layer and having a composition that is different from a composition of the first layer;
- manufacturing at least one chip from the wafer;
- and
- arranging the at least one chip on a chip holding member.
1 more element
Dependencies are inferred from the claim text.