Substrate processing apparatus and substrate processing method

A substrate processing apparatus comprising:

• a first front portion;
• a first rear portion;
• and
• a bridge portion,
• wherein the first front portion, the bridge portion, and the first rear portion are arranged in this order in a first direction,
• the first direction is horizontal,
• the first front portion includes:
• a plurality of processing units;
• and
• a first front transport mechanism configured to transport a substrate to each of the processing units of the first front portion,
• the first rear portion includes:
• a plurality of processing units;
• and
• a first rear transport mechanism configured to transport a substrate to each of the processing units of the first rear portion, and
• the bridge portion includes a first distribution mechanism, and
• the first distribution mechanism places a substrate in the first front portion, and places a substrate in the first rear portion.