Substrate processing apparatus and substrate processing methodd

A substrate processing apparatus comprising:

• an indexer portion;
• a slider portion;
• a bridge portion;
• a first front portion;
• and
• a first rear portion,
• wherein the indexer portion, the slider portion, and the bridge portion are arranged in this order in a first direction,
• the first direction is horizontal,
• the first front portion, the bridge portion, and the first rear portion are arranged in this order in the first direction,
• the slider portion transports a substrate between the indexer portion and the bridge portion,
• the bridge portion transports a substrate between the slider portion and the first front portion, and transports a substrate between the slider portion and the first rear portion,
• the first front portion includes:
• a plurality of processing units;
• and
• a first front transport mechanism configured to transport a substrate to each of the processing units of the first front portion,
• the first rear portion includes:
• a plurality of processing units;
• and
• a first rear transport mechanism configured to transport a substrate to each of the processing units of the first rear portion, and
• the slider portion overlaps with the processing units of the first front portion in plan view.